Ripple reduction in piezoelectric micropumps by phased actuation in parallel and damping

Piezoelectric micropumps enable miniaturization in microfluidics for lab-on-a-chip applications such as Organs-on-chips (OoC). However, achieving a steady flow with these micropumps is a significant challenge because of the reciprocating motion of the displacing component. Although dampers are widely preferred for reducing ripples, they are not...

Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found in the literature that use Si-based microvalves,...

Proportional Microvalve Using A Piezoelectric Unimorph Microactuator

Microvalves are important flow-control components in many standalone and integrated microfluidic circuits. Although there is a large body of work regarding<br/>microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the...