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Akgün, O.C. (author), Nanbakhsh, K. (author), Giagka, Vasiliki (author), Serdijn, W.A. (author)For mm-sized implants incorporating silicon integrated circuits, ensuring lifetime operation of the chip within the corrosive environment of the body still remains a critical challenge. For the chip's packaging, various polymeric and thin ceramic coatings have been reported, demonstrating high biocompatibility and barrier properties. Yet, for...journal article 2020
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Sweers, Korné (author)Thermal oxidation in silicon microelectromechanical systems (MEMS) induces stress in the oxide film and silicon. Such residual stresses are usually unwanted, as it can influence performance or damage components. It can also cause unwanted plastic deformation in silicon, as was observed in previous research. Currentmeasurement methods inMEMSare...master thesis 2018
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Shi, Shengtai (author)This thesis study investigates the effects of differently prepared oxide substrates on gas sensing behaviors of graphene gas sensor. Explanations for why such effects happen are also revealed through experimental works. The thesis consists of a detailed study of gas sensing behaviors from graphene gas sensors using different oxide substrates....master thesis 2017
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Botman, A. (author), De Winter, D.A.M. (author), Mulders, J.J.L. (author)Electron-beam-induced deposition of platinum from methylcyclopentadienyl-platinum-trimethyl was performed with a focused electron beam at low landing energies, down to 10?eV. The deposition growth rate is maximal at 140?eV, with the process being over ten times more efficient than at 20?kV. No significant dependence of composition with landing...journal article 2008