Searched for: subject%3A%22Sputtering%22
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Derksen, M. (author), Bizinoto Ferreira Bosco, G. (author), Muller, Timo (author), van der Kolk, E. (author)
The characterization of a wide range of luminescent thin films can be a long and tedious endeavor. With reactive combinatorial sputtering of multiple metal targets, it possible to fabricate thin films with a gradient in composition simply by not rotating the substrate. In this work, combinatorically sputtered thin films of Cr<sup>3+</sup> and...
journal article 2024
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Basyooni, Mohamed A. (author), En-nadir, Redouane (author), Rahmani, Khalid (author), Eker, Yasin Ramazan (author)
In this study, we delved into the influence of Ir nanofilm coating thickness on the optical and optoelectronic behavior of ultrathin MoO3 wafer-scale devices. Notably, the 4 nm Ir coating showed a negative Hall voltage and high carrier concentration of 1.524 × 1019 cm−3 with 0.19 nm roughness. Using the Kubelka–Munk model, we found that the...
journal article 2023
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Singh, Sukhvinder (author), Abelmann, L. (author), Gao, Haibin (author), Hartmann, Uwe (author)
Well-defined and technically relevant domain configurations are sought in patterned magnetic thin films. We used Magnetic Force Microscopy to investigate these in square-patterned Permalloy films. The films were prepared using dc sputter deposition by varying the Argon pressure from 1.5×10−3 to 30.0×10−3 mbar. The Landau domain configuration was...
journal article 2023
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van der Zalm, Joost (author)
One of the main components used in superconducting quantum chips is the Josephson junction. Currently when fabricating Josephson junctions, the resistance uniformity at wafer-scale is not optimal. It is also known that an annealing process can alter the junction resistance and with it the qubit frequency. However, laser annealing has only shown...
master thesis 2022
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Bizinoto Ferreira Bosco, G. (author), van den Biesen, J. K. (author), Boers, C. D. (author), Simone, G. (author), Kao, C.C. (author), Tichelaar, F.D. (author), Boshuizen, B. (author), van der Kolk, E. (author)
Silicon-aluminum-oxigen (SiAlO) coatings doped with Sm<sup>2+</sup> and prepared by reactive magnetron co-sputtering of Si, Al, and Sm targets, are attractive for luminescence solar concentrator applications but suffer from the low absorption between 300 and 600 nm. This article reports that the main cause of low absorption is a high...
journal article 2022
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Tian, Y. (author)
Energy and materials have been assigned with great significance for the development of society over the past centuries. For the sake of environmental sustainability, earth-abundant and eco-friendly materials for energy utilization have been gaining increasing attention. Among them, barium disilicide (BaSi2) possesses attractive optical and...
doctoral thesis 2021
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sten (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)
This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up...
journal article 2021
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Merkx, E.P.J. (author), Plokker, M.P. (author), van der Kolk, E. (author)
The parameters governing the performance of a luminescent solar concentrator (LSC) are determined for sputtered thin-films of NaI:Tm<sup>2+</sup>, CaBr<sub>2</sub>:Tm<sup>2+</sup>, and CaI<sub>2</sub>:Tm<sup>2+</sup>. These parameters are determined by using six gradient thin film material libraries, combinatorially sputtered from metallic...
journal article 2021
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Li, Ye (author), Mirza Gheytaghi, Amir (author), Trifunovic, M. (author), Xu, Yuanxing (author), Zhang, Kouchi (author), Ishihara, R. (author)
3D integration has well-developed for traditional CMOS technology operating at room temperature, but few studies have been performed for cryogenic applications such as quantum computers. In this paper, a wafer-to-wafer bonding of superconductive joints based on niobium nitride (NbN) is performed to demonstrate the possibility of 3D...
journal article 2021
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Meeuwissen, A.A. (author), Bizinoto Ferreira Bosco, G. (author), van der Kolk, E. (author)
This paper reports the fabrication and characterization of several thulium oxide and nitride thin films grown by reactive magnetron direct-current sputtering. Hysteresis curves of the Tm emission spectra of the sputtering plasma versus the flow of N<sub>2</sub> or O<sub>2</sub> around the Tm-metal target were monitored. Emission spectra of...
journal article 2021
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sven (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)
This paper presents the fabrication and electrical characterization of superconducting high-aspect ratio through-silicon vias DC-sputtered with aluminum. Fully conformal and void-free coating of 300 μm-deep and 50 μmwide vias with Al, a CMOS-compatible and widely available superconductor, was made possible by tailoring a funneled sidewall...
journal article 2020
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Jeevanandam, G. (author), van der Meijden, V. (author), Birnie, L. D. (author), Kruit, P. (author), Hagen, C.W. (author)
To allow researchers to fabricate micro- and nano-devices on a small scale, without having to use complex cleanroom facilities, a single tool is proposed in which a variety of typical cleanroom techniques and processes is combined. This ‘cleanroom’ in SEM tool, based on a scanning electron microscope (SEM), integrates several add-on tools,...
journal article 2020
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Merkx, E.P.J. (author), van Overbeek, S. (author), van der Kolk, E. (author)
SiAlON window coatings are applied on an industrial scale to achieve e.g. scratch-resistance and anti-reflection. Doping these SiAlONs with rare-earths adds luminescent functionality, which could be applied in photovoltaics. By using a combinatorial reactive sputtering approach, an amorphous thin film composition library with a Si:Al ratio...
journal article 2019
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Nafezarefi, F. (author), Cornelius, S. (author), Nijskens, J. (author), Schreuders, H. (author), Dam, B. (author)
Thin films of yttrium oxy-hydride have interesting, reversible photochromic properties, the origin of which is poorly understood. To investigate the role of point defect mobility, we probed the effect of lattice contraction as induced by the addition of zirconium. Interestingly, we find no loss of photochromic contrast for Y <sub>1-z</sub>...
journal article 2019
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Merkx, E.P.J. (author), Lensvelt, T.G. (author), van der Kolk, E. (author)
Building-integrated photovoltaics are drawing much attention to make the built environment self-sufficient in terms of electricity. Luminescent solar concentrators (LSCs) can provide this electricity generation when used as photovoltaic windows. Paramount to an efficient LSC are non-overlapping absorption and emission spectra, to avoid self...
journal article 2019
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Tian, Y. (author), Vismara, R. (author), van Doorene, S. (author), Šutta, Pavol (author), Vančo, L’ubomír (author), Veselý, Marian (author), Vogrinčič, Peter (author), Isabella, O. (author), Zeman, M. (author)
Barium disilicide (BaSi2) has been regarded as a promising absorber material for high-efficiency thin-film solar cells. However, it has confronted issues related to material synthesis and quality control. Here, we fabricate BaSi2 thin films via an industrially applicable sputtering process and uncovered the mechanism of structure transformation....
journal article 2018
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Joshi, S. (author), Savov, A.M. (author), Shafqat, Salman (author), Dekker, R. (author)
The authors found that oxygen plasma etching of polyimide (PI) with aluminum (Al) as a hard-etch mask results in lightly textured arbitrary shaped “fur-like” residues. Upon investigation, the presence of Al was detected in these residues. Ruling out several causes of metal contamination that were already reported in literature, a new theory for...
journal article 2018
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Merkx, E.P.J. (author), van der Kolk, E. (author)
Understanding the behavior of combinatorially developed luminescent materials requires detailed characterization methods that have been lacking thus far. We developed a device for directly surveying the luminescent properties of thin-film libraries created through combinatorial gradient sputter deposition. Step-scan recorded excitation-,...
journal article 2018
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Bos, Boy Gustaaf Cornelis (author), Thoen, David (author), Haalebos, E. A.F. (author), Gimbel, P. M.L. (author), Klapwijk, T.M. (author), Baselmans, J.J.A. (author), Endo, A. (author)
The superconducting critical temperature (T-\mathrm{c} &gt; 15 K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multipixel imaging with advanced detectors. The drive for large-scale detector microchips is demanding NbTiN films with uniform properties over an...
journal article 2017
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Phung, T.T.N. (author)
To reduce the usage of Indium (rare material) in CIGS, ultra thin, high efficiency CIGS based solar devices have been developed in our group. One approach is to fabricate hybrid tandem cells between hydrogenated amorphous silicon and CIGS. Because the a-Si:H top sub-cell limits the current of such a device, it is desirable to texture the top...
master thesis 2017
Searched for: subject%3A%22Sputtering%22
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