Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators

Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen...

Deposited Dielectrics with Low Cryogenic Microwave Loss and Their Room Temperature Properties

Superconducting resonators used in mm/sub-mm (MMW) astronomy would greatly benefit from deposited dielectrics with low dielectric loss. The excess loss in deposited dielectrics is mainly due to two-level systems (TLS), and there is no consensus on their microscopic origin. To study the relation between hydrogenated amorphous silicon’s (a-Si:H)...

Nanoelectromechanical resonators from high-T _c superconducting crystals of Bi ₂ Sr ₂ Ca ₁ Cu ₂ O<IMG ALIGN=MIDDLE ALT=-8+δ

In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T _c cuprate superconductor Bi ₂ Sr ₂ Ca ₁ Cu ₂ O. The mechanical readout is performed by capacitively coupling their motion to a coplanar waveguide microwave cavity fabricated...