Poot, Maurice (author), van Hulst, Jilles (author), Yan, Kai Wa (author), Kostic, Dragan (author), Portegies, Jim (author), Oomen, T.A.E. (author) The increasing demands on throughput and accuracy of semiconductor manufacturing equipment necessitates accurate feedforward motion control that includes compensation of input nonlinearities. The aim of this paper is to develop a data-driven feedforward approach consisting of a Wiener feedforward, i.e., linear parameterization with an output...
journal article 2023
