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Campos de Oliveira, A. (author), Pan, Sining (author), Wiegerink, Remco J. (author), Makinwa, K.A.A. (author)This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...journal article 2022