Skip to main content
TudRepo
Research repository
Education Repository
Cultural Heritage
About
·
How to search
Include full text
Search results
Back
Searched for: subject%3A%22electronics%22
(1 - 1 of 1)
Document type
Date
List view
Grid view
Print
Email
export CSV
export Excel
document
High-dose exposure of silicon in electron beam lithography
Grogorescu, A.E. (author), Van der Krogt, M.C. (author), Van der Drift, E.W.J.M. (author), Hagen, C.W. (author)
journal article 2008