High Precision Flow Compensated Thermal Conductivity Detector for Gas Sensing with Read-out Circuit

In this work, a novel approach is presented for in-line flow compensation using a dual-Thermal conductivity detector (TCD). TCDs demonstrate a flow dependence and require a calibration at a fixed flow rate. The dual-TCD is composed of two thin-film sensors on membranes in parallel on the same chip. Both are laterally identical, but with a...

Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas

Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the flow dependence is based on the on-line flow compensation using two thin-film sensors on membranes in parallel on the same chip that are differentially operated. These are laterally identically, but with a different depth...