Performance Analysis of Si-Based Ultra-Shallow Junction Photodiodes for UV Radiation Detection

This thesis presents a performance investigation of newly-developed ultra-shallow junction photodiodes (PureB-diodes) for ultraviolet (UV) radiation detection. The photodiodes are fabricated by pure boron chemical vapor deposition (PureB CVD) technology, which can provide nanometer-thin boron capping layer and nanometer-deep defect-free p+n...