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document
Salman, Yusuf (author)
The high-tech industry is pushing the motion system technology towards faster, more precise and more robust system. One of the keys to this growing demand is the advancement of motion control. To this day, Proportional-Integral-Derivative (PID) has been the workhorse for the industry system control. This is because PID is simple to design and...
master thesis 2018
document
Chen, Linda (author)
In high-tech industry (sub)nanometre precision motion control is essential. For example wafer scanners, used for production of integrated circuits, have to provide (sub)nanometre precision positioning whilst satisfying challenging requirements on speed at the same time. It is in demanding cases like this that different requirements begin to...
master thesis 2017