Optomechanics in a 3D microwave cavity

This thesis explores certain technologies that are related to the field of cavity optomechanics; specifically, optomechanics where the cavity is a 3Dmicrowave cavity.

Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 10^8

We study the mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor (Q) metalized silicon nitride membranes at temperatures down to 14?mK using a three-dimensional optomechanical cavity. Below 200?mK, high-Q modes of the membranes show a diverging increase of Q with decreasing temperature, reaching Q=1.27×108Q=1...