Integration Technologies for Smart Catheters

Around 10% of the population will have to go through a catheterization procedure for the treatment of a cardiovascular disease at a certain stage of their lives. During such a procedure, smart catheters will be the "eyes and ears" of the surgeons, significantly improving the diagnosis and treatment. However, there have been very limited...

Characterization of biosensing with integrated photonic microchips for wearable photonics in health monitoring

Photonics biosensors convert biomolecular interactions into quantifiable optical signals for biomedical analysis, which enable continuous monitoring of health indicators. Among them the microring resonator has a good sensing performance and a very broad application prospect. This thesis studies sensing with microfluidic integrated microring...

Engineering of the spin on dopant process on silicon on insulator substrate

We report on a systematic analysis of phosphorus diffusion in silicon on insulator thin film via spin-on-dopant process (SOD). This method is used to provide an impurity source for semiconductor junction fabrication. The dopant is first spread into the substrate via SOD and then diffused by a rapid thermal annealing process. The dopant...

Cavity‐box soi: Advanced silicon substrate with pre‐patterned box for monolithic mems fabrication

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer‐defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity‐BOX) that contains a patterned BOX...

Novel method of alignment to buried cavities in cavity-SOI wafers for advanced MEMS devices

Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer surface is essential to advanced MEMS production. Existing alignment methods are well defined, but often require specialized equipment or costly software packages available only in professional manufacturing environments. It would be beneficial...

A sustainability-oriented innovation selection method for service firms: A design process and a practice-validated prototype

Flexible CMOS Single-Photon Avalanche Diode Image Sensor Technology

Intensified Protein Structuring for more sustainable foods: Development of the up-scaled Couette Cell for the production of meat replacers

To meet the increasing need for protein-rich food of an ever growing population, plant-based proteins are being utilized in meat products as replacements for animal-based proteins. Legumes such as soy can serve as an alternative protein source, by featuring both high protein content (36%) and protein functionality (gelation). Nowadays various...

Characterization of Single-Photon Avalanche Diodes in Standard 140-nm SOI CMOS Technology

We report on the characterization of single-photon avalanche diodes (SPADs) fabricated in standard 140-nm silicon on insulator (SOI) complementary metal-oxide-semiconductor (CMOS) technology. As a methodology for SPAD optimization, a test structure array, called SPAD farm, was realized with several junctions, guard-ring structures, dimensions,...

Resonant Air Quality Sensor

In this Thesis report the modeling, design, simulation, fabrication and measurements done at the Resonant Air Quality Sensor is described. The sensor is based on a resonant system, made in a silicon wafer with MEMS technology. By depositing the particles to be measured on top of the mass, the total mass of these particles can be measured by...

Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology

This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and...

Design and Modeling of a Flexible Contact-Mode Piezoresistive Detector for Time-Based Acceleration Sensing

This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...

SOI Digital Accelerometer Based on Pull-in Time Configuration

The operation principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on a thin silicon-on-insulator (SOI) substrate is presented. The accelerometer features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital...