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S Srikanth Hari
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Focused Electron Beam Induced Deposition of 1,1-dichloro-1-silacyclohexane, silacyclohexane and 1,3,5-trisilacyclohexane; preliminary study on the role of low energy secondary electrons in the deposition process
Journal article -
O Ingolfsson
,
R. Kumar
,
C.W. Hagen
,
. Srikanth Hari