WG
Widesh Gahar
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This study presents an AlN based Lamb wave (A0 mode) liquid sensing device that can be used for biomedical applications. The Lamb wave device features a 1.5 μm composite membrane consisting of a 500 nm LPCVD SiN and a 1 μm of a c-axis oriented AlN film. A 45° rotated design was a
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