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D.B. Boltje
Authored
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Non-conducting interfaces of LaAlO3/SrTiO3 produced in sputter deposition
The role of stoichiometry
We have investigated the properties of interfaces between LaAlO3 films grown on SrTiO3 substrates singly terminated by TiO2. We used RF sputtering in a high-pressure oxygen atmosphere. The films are smooth, with flat surfaces. Transmission electron microscopy shows sharp and cont
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