Vv

V.S. van Merrienboer

1 records found

Development of a 1000°C-capable LED-based RTP Reactor

Design and Optimisation Study of an 88kW LED Heater Array for Uniform and Rapid Thermal Processing of 300mm Silicon Wafers

High-powered LED arrays have emerged as a viable alternative to halogen lamp-based arrays for heating silicon wafers to 1000C due to their monochromatic radiosity which can be chosen in an efficient bandwidth for high absorption into silicon, removing the requirement for the pre- ...