Large language models have shown impressive performance in various domains, including code generation across diverse open-source domains. However, their applicability in proprietary industrial settings, where domain-specific constraints and code interdependencies are prevalent, remains largely unexplored. We present a case study conducted in collaboration with the leveling department at ASML to investigate the performance of LLMs in generating functional, maintainable code within a closed, highly specialized software environment.We developed an evaluation framework tailored to ASML’s proprietary codebase and introduced a new benchmark. Additionally, we proposed a new evaluation metric, build@k, to assess whether LLM-generated code successfully compiles and integrates within real industrial repositories. We investigate various prompting techniques, compare the performance of generic and code-specific LLMs, and examine the impact of model size on code generation capabilities, using both match-based and execution-based metrics. The findings reveal that prompting techniques and model size have a significant impact on output quality, with few-shot and chain-of-thought prompting yielding the highest build success rates. The difference in performance between the code-specific LLMs and generic LLMs was less pronounced and varied substantially across different model families. ... Read more