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M. J. Engelmann
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Photonic pressure sensor in silicon on insulator
Conference paper -
P. J. Harmsma
,
M. J. Engelmann
,
R. Schmits
,
W.J. Westerveld
,
J. H. van den Berg
,
K Agovic
,
R. E. van Vliet
,
M. Yousefi