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R. Mallee
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1 records found
The development of a low-stress polysilicon process compatible with standard device processing
Journal article -
P.J. French
,
B.P. van Drieenhuizen
,
D. Poenar
,
J.F.L. Goosen
,
R. Mallee
,
P.M. Sarro
,
R.F. Wolffenbuttel