With the fast expanding photovoltaic (PV) industry, we are currently witnessing an unprecedented evolution of high-efficiency PV technologies in laboratories. The topic of this thesis is certainly among the novel technologies that could eventually break through on the market. Ultra-thin molybdenum oxide (MoOx) layer, as a hole-selective contact in a silicon heterojunction (SHJ) solar cell, was found to be suitable due to its transparency and high work function. This work presents the implementation of a MoOx layer in a 6 inch SHJ solar cell piloting towards an industrial level. Moreover, with MoOx commonly thermally deposited, this report shows the applicability of the electron beam evaporator for large scale deposition.