J. Tang | TU Delft Repository

JT

J. Tang

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Conference paper (7)

Doctoral thesis (1)

Journal article (1)

9 records found

1

MIP plasma decapsulation of copper¿wired semiconductor devices for failure analysis

Doctoral thesis (2014) - J. Tang (author), C.I.M. Beenakker (supervisor)

Microwave induced plasma decapsulation of stressed and delaminated high pin-count copper wire bonded IC packages

Conference paper (2013) - J. Tang (author), CH Chen (author), SK Liang (author), EGJ Reinders (author), CTA Revenberg (author), JBJ Schelen (author), C.I.M. Beenakker (author)

Fast etching of molding compound by an Ar/O2/CF4 plasma and process improvements for semiconductor package decapsulation

Journal article (2012) - J. Tang (author), D Gruber (author), JBJ Schelen (author), H-J Funke (author), C.I.M. Beenakker (author)

Decapsulation of high pin count IC packages with palladium coated copper wire bonds using an atmospheric pressure plasma

Conference paper (2012) - J. Tang (author), EGJ Reinders (author), CTA Revenberg (author), JBJ Schelen (author), C.I.M. Beenakker (author)

Process control in plasma decapsulation: Preventing damage to the copper wire bonds and controlled removal of Si3N4 passivation layer

Conference paper (2012) - J. Tang (author), C.I.M. Beenakker (author), JBJ Schelen (author)

Flexible system for real-time plasma decapsulation of copper wire bonded ic packages

Conference paper (2012) - J. Tang (author), JBJ Schelen (author), C.I.M. Beenakker (author)

Plasma decapsulation of plastic IC packages with copper wire bonds for failure analysis

Conference paper (2011) - J. Tang (author), H. Ye (author), JBJ Schelen (author), C.I.M. Beenakker (author)

Plasma etching for failure analysis of integrated circuit packages

Conference paper (2011) - J. Tang (author), JBJ Schelen (author), C.I.M. Beenakker (author)

Optimization of the microwave induces plasma system for failure analysis in integrated circuit packaging

Conference paper (2010) - J. Tang (author), JBJ Schelen (author), C.I.M. Beenakker (author)