Mv
M.E. van Schagen
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The CNT-SiC composite material has in the past been demonstrated to be useful for high-aspect-ratio MEMS devices for harsh environments. This work explores the possibility of combining these MEMS devices with SiC active devices on the same wafer to create smart sensors. The fabrication process was not successful. This work exposes where further work is required, and it proposes modifications to the fabrication process to make it simpler and more robust for future attempts. Moreover, it finds that the release step of CNT-SiC devices is prone to the release of anchor points. It is theorized that this may be caused by the etchant diffusing through the porous CNT-SiC structure. This work also explores various parameters related to the CNT-SiC material.
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The CNT-SiC composite material has in the past been demonstrated to be useful for high-aspect-ratio MEMS devices for harsh environments. This work explores the possibility of combining these MEMS devices with SiC active devices on the same wafer to create smart sensors. The fabrication process was not successful. This work exposes where further work is required, and it proposes modifications to the fabrication process to make it simpler and more robust for future attempts. Moreover, it finds that the release step of CNT-SiC devices is prone to the release of anchor points. It is theorized that this may be caused by the etchant diffusing through the porous CNT-SiC structure. This work also explores various parameters related to the CNT-SiC material.
This thesis focuses on finding a control algorithm that, based on a list of requirements, is most suitable for driving the 25 A permanent magnet synchronous motor and propeller that are provided by Fusion Engineering. Various control algorithms are investigated, and basic implementations are simulated. Based on the investigation, it was decided to further optimize the implementation for trapezoidal control and field oriented control. These two algorithms were benchmarked, in order to determine which is more in line with the requirements. This thesis proposes an implementation for a trapezoidal controller that meets most of the requirements.
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This thesis focuses on finding a control algorithm that, based on a list of requirements, is most suitable for driving the 25 A permanent magnet synchronous motor and propeller that are provided by Fusion Engineering. Various control algorithms are investigated, and basic implementations are simulated. Based on the investigation, it was decided to further optimize the implementation for trapezoidal control and field oriented control. These two algorithms were benchmarked, in order to determine which is more in line with the requirements. This thesis proposes an implementation for a trapezoidal controller that meets most of the requirements.