JV
Jaco H. Visser
2 records found
1
The proper usage of a bandwidth-limited imaging bolometer for the measurement of the lateral temperature profile of microstructures in Silicon-Carbide (SiC) is analyzed. The SiC spectral emissivity, (Formula presented.), has a dip at (Formula presented.) (Formula presented.) m, w
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Nitride-rich silicon-nitride (SiNx) is being explored for its potential as a suitable optical material for use in microsystems operating in the near-UV spectral range. Although silicon-rich SiNx is widely accepted as a CMOS-compatible dielectric and micromechanical material, its
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