MS
M. Stoffel
Authored
1 records found
SiGe growth on patterned Si(001) substrates
Surface evolution and evidence of modified island coarsening
The morphological evolution of both pits and SiGe islands on patterned Si(001) substrates is investigated. With increasing Si buffer layer thickness the patterned holes transform into multifaceted pits before evolving into inverted truncated pyramids. SiGe island formation and ev
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