CV

C.L. Valentin

Authored

1 records found as author

Curvature Manipulation of Photomasks - Enhancing the imaging performance of immersion lithography equipment
Doctoral thesis (2013) - C.L. Valentin, R.H. Munnig Schmidt, D.J. Rixen
This thesis investigates the feasibility of a photomask curvature manipulator in immersion lithography systems.