LD

L.C.N. De Vreede

Authored

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Substrate transfer Thermal resistance Heatspreaders Thermal instability Silicon-on-glass technology Varactors Adaptive circuits Aluminum nitride deposition Bipolar junction transistors (BJTs) Complementary bipolar silicon technology Heterojunction bipolar transistors (HBTs) Microwave devices Radio frequency (RF) circuits Schottky collector contacting Selfheating Thin-film heatspreaders Two-sided contacting Wireless systems
This paper reviews special RF/microwave silicon device implementations in a process that allows two-sided contacting of the devices: the back-wafer contacted silicon-on-glass (SOG) substrate-transfer technology (STT) developed at DIMES. In this technology, metal transmission line ...