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C. Yuan
Authored
1 records found as author
The chemical-mechanical relationship of the SiOC(H) dielectric film
Conference paper (2007) -
C. Yuan
,
O. Van Der Sluis
,
G.Q. Zhang
,
L.J. Ernst
,
W.D. Van Driel
,
R.B.R. Van Silfhout
,
B.J. Thijsse