Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology

Wavefront reconstruction using intensity measurements for real-time adaptive optics

Iterative learning control of a membrane deformable mirror for optimal wavefront correction

Linear phase retrieval for real-time adaptive optics

Predictive control of thermally inducted wavefront aberrations

Robustness analysis of non-linear phase retrieval from single intensity measurement

Theoretical analysis for best defocus measurement plane for robust phase retrieval.

Identification of a dynamical model of a thermally actuated deformable mirror

Terahertz wavefronts measured using the Hartmann sensor principle

Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics

An innovative and efficient method to control the shape of push-pull membrance deformable mirror

Determination of wavefront structure for a Hartmann Wavefront Sensor using a phase-retrieval method

Wavefront Measurement for EUV Lithography System through Hartmann Sensor

Non-interferometric wavefront sensing technique for EUV Lithography system