I.L. Tuinman

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Journal article (1)

1 records found

Raman spectroscopy as an on-line measurement technique in a laser-CVD reactor during production of Si sub 3N sub 4

Journal article (1996) - I.L. Tuinman (author) , J. Veenstra (author) , J.C.M. Marijnissen (author) , B. Scarlett (author) , J. Schoonman (author)