33 records found
1
Design and fabrication of an Albedon insensitive analog sun sensor
A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas
IR microspectrometers based on linear-variable optical filters
MEMS-based lineair thermopile detector arrays for ir microspectrometers
A surface micromachined thermopile detector array with an interference-based absorber
A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry
Surface micromached gas sensor using thermopiles for carbon dioxide detection
Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer
Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays
Microspectrometer with a concave grating fabricated in a MEMS technology
Vertically tapered layers for optical applications fabricated using resist reflow
Self-powered optical sensor systems
Self-powered sun sensor microsystems
Interference filter based IR absorber for MEMS thermopile array
Characterization of thermal cross-talk in a MEMS-based thermopile detector array
IC-compatible fabrication of linear variable optical filters for micro-spectrometer
Study of thermal cross-talk in micromachined thermopile based infrared detector arrays
Concave diffraction gratings fabricated with planar lithography
Fabrication of trapped optical structures using resist reflow
Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer