MEMS-based lineair thermopile detector arrays for ir microspectrometers

A surface micromachined thermopile detector array with an interference-based absorber

IR microspectrometers based on linear-variable optical filters

A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

Design and fabrication of an Albedon insensitive analog sun sensor

A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

Surface micromached gas sensor using thermopiles for carbon dioxide detection

Self-powered optical sensor systems

Microspectrometer with a concave grating fabricated in a MEMS technology

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Interference filter based IR absorber for MEMS thermopile array

Vertically tapered layers for optical applications fabricated using resist reflow

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Self-powered sun sensor microsystems

Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

High-resolution microspectrometer with an aberration-correcting planar grating