33 records found
1
A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas
Design and fabrication of an Albedon insensitive analog sun sensor
A surface micromachined thermopile detector array with an interference-based absorber
IR microspectrometers based on linear-variable optical filters
MEMS-based lineair thermopile detector arrays for ir microspectrometers
Surface micromached gas sensor using thermopiles for carbon dioxide detection
Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer
A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry
Microspectrometer with a concave grating fabricated in a MEMS technology
Interference filter based IR absorber for MEMS thermopile array
Self-powered sun sensor microsystems
IC-compatible fabrication of linear variable optical filters for micro-spectrometer
Self-powered optical sensor systems
Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays
Study of thermal cross-talk in micromachined thermopile based infrared detector arrays
Vertically tapered layers for optical applications fabricated using resist reflow
Characterization of thermal cross-talk in a MEMS-based thermopile detector array
Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph
Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer
Optical microspectrometer with planar grating and external spherical