MEMS-based lineair thermopile detector arrays for ir microspectrometers

Design and fabrication of an Albedon insensitive analog sun sensor

IR microspectrometers based on linear-variable optical filters

A surface micromachined thermopile detector array with an interference-based absorber

A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry

Surface micromached gas sensor using thermopiles for carbon dioxide detection

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Microspectrometer with a concave grating fabricated in a MEMS technology

Vertically tapered layers for optical applications fabricated using resist reflow

Self-powered optical sensor systems

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Interference filter based IR absorber for MEMS thermopile array

Self-powered sun sensor microsystems

Simulation and analytical calculation of reflowed resist structures

Optical microspectrometer with planar grating and external spherical

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer