A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

Design and fabrication of an Albedon insensitive analog sun sensor

A surface micromachined thermopile detector array with an interference-based absorber

IR microspectrometers based on linear-variable optical filters

MEMS-based lineair thermopile detector arrays for ir microspectrometers

Surface micromached gas sensor using thermopiles for carbon dioxide detection

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry

Microspectrometer with a concave grating fabricated in a MEMS technology

Interference filter based IR absorber for MEMS thermopile array

Self-powered sun sensor microsystems

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Self-powered optical sensor systems

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Vertically tapered layers for optical applications fabricated using resist reflow

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

Optical microspectrometer with planar grating and external spherical