HS
H.W.M. Salemink
44 records found
1
We demonstrate a nanophotonic sensor for real-time monitoring of fluid flows. The sensor is based on a silicon photonic crystal cavity with a well aligned micro fluidic channel for fluid-injection. The simulated resonant wavelength shift of the sensor with residual oil in holes i
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A planarized on-chip nanophotonic sensor based on a photonic crystal cavity is realized in this work. The sensor was embedded in a solid protecting material (flowable oxide) with perfect filled holes: this eliminates problems of fouling in practical applications. The functional a
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We studied the formation of locally coated sub-10-nm nanopores fabricated by ion-beam milling and ion-beam-induced deposition (IBID) in a thin silicon nitride membrane. Two typical precursor gases representing conductive ((CH3)(3)Pt(CpCH3). CPC for short) and insulating (tetra et
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