Pezone, R. (author), Anzinger, Sebastian (author), Baglioni, G. (author), Wasisto, Hutomo Suryo (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author) Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene’s suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on...
journal article 2024