Print Email Facebook Twitter High-performance wafer-scale transfer-free graphene microphones Title High-performance wafer-scale transfer-free graphene microphones Author Pezone, R. (TU Delft Electronic Components, Technology and Materials) Baglioni, G. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Date 2023 Abstract A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene diaphragms in microphones due to the absence of automatic transfer methods on non-planarized target substrates. This method aims to overcome this limitation by combining a full-dry release of Chemical Vapor Deposition (CVD) graphene by Deep Reactive Ion Etching (DRIE) and vapor HF (VHF). Subject GrapheneMicrophoneMembraneWafer-ScaleMEMSTransfer-Free To reference this document use: http://resolver.tudelft.nl/uuid:315adfa7-a258-44a7-a426-33da85dc027e DOI https://doi.org/10.1109/MEMS49605.2023.10052360 Publisher IEEE, Danvers Embargo date 2023-09-01 ISBN 978-1-6654-9309-3 Source Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Event 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023-01-15 → 2023-01-19, Munich, Germany Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2023 R. Pezone, G. Baglioni, Pasqualina M Sarro, P.G. Steeneken, S. Vollebregt Files PDF High_Performance_Wafer_Sc ... phones.pdf 1.77 MB Close viewer /islandora/object/uuid:315adfa7-a258-44a7-a426-33da85dc027e/datastream/OBJ/view