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document
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Hekner, S.M. (author)
ASML's wafer scanners are crucial machines in the production of integrated circuits (ICs). An important performance parameter in these photo-lithographic machines is the so-called stacking precision, which is a measure for the accurate stacking of multiple layers during the photo-lithography process in the xy-plane. The stacking precision is,...
master thesis 2016
Source URL (retrieved on 2024-06-02 12:45): https://repository.tudelft.nl/islandora/search/author%3A%22Hekner%2C%20S.M.%22?collection=education&f%5B0%5D=mods_subject_topic_ss%3A%22Experiment%5C%20design%22