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document
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Zagwijn, P.M. (author), Verweij, W. (author), Pierreux, D. (author), Noureddine, A. (author), Bankras, R. (author), Oosterlaken, E. (author), Snijders, G.J. (author), Van den Hout, M. (author), Fischer, P. (author), Wilhelm, R. (author), Knapp, M. (author)
This article describes a novel CVD process for TiN films developed in a 300 mm Vertical Furnace. We have solved Chlorine incorporation at low temperature inside the TiN layer while at the same time the batch process yields a 3 times higher throughput per dual reactor system compared to a single wafer system with 3 chambers.We show process...
journal article 2009
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document
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Zagwijn, P.M. (author), Verweij, W. (author), Pierreux, D. (author), Noureddine, A. (author), Bankras, R. (author), Oosterlaken, E. (author), Snijders, G.J. (author), Van den Hout, M. (author), Fischer, P. (author), Wilhelm, R. (author), Knapp, M. (author) journal article 2008
Source URL (retrieved on 2024-05-27 01:43): https://repository.tudelft.nl/islandora/search/author%3A%22Van%20den%20Hout%2C%20M.%22?f%5B0%5D=mods_name_personal_author_namePart_family_ss%3A%22Bankras%22&f%5B1%5D=mods_genre_s%3A%22journal%5C%20article%22