Source URL (retrieved on 2024-05-23 10:03): https://repository.tudelft.nl/islandora/search/subject%3A%22MEMS%22?collection=research&display=tud_grid&f%5B0%5D=mods_name_personal_author_namePart_family_ss%3A%22Prak%22&f%5B1%5D=mods_name_personal_author_namePart_family_ss%3A%22Renukappa%22&f%5B2%5D=mods_subject_topic_ss%3A%22Photonic%5C%20integrated%5C%20circuit%22&f%5B3%5D=mods_name_personal_author_namePart_family_ss%3A%22Wu%22&f%5B4%5D=mods_name_personal_author_namePart_family_ss%3A%22Uhlig%22&f%5B5%5D=mods_name_personal_author_namePart_family_ss%3A%22Flintham%22&f%5B6%5D=mods_name_personal_author_namePart_family_ss%3A%22Rose%22&f%5B7%5D=mods_name_personal_author_namePart_family_ss%3A%22Robbins%22