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document
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Van Leeuwen, R. (author)
In this thesis the physics of nanoscale mechanical resonators and oscillators is studied. We discuss two types of resonators. First, a top-down fabricated doubly clamped beam resonator with an integrated piezoelectric actuator is introduced. The second type of resonators are based on layered two-dimensional materials, such as graphene and...
doctoral thesis 2015
Source URL (retrieved on 2024-04-27 04:48): https://repository.tudelft.nl/islandora/search/subject%3A%22MEMS%22?collection=research&f%5B0%5D=mods_subject_topic_ss%3A%22NEMS%22&f%5B1%5D=mods_subject_topic_ss%3A%22nonlinearities%22