Electron optics of multi-beam scanning electron microscope
Journal Article
(2011)
Author(s)
Ali Mohammadi-Gheidari (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
DOI related publication
https://doi.org/10.1016/j.nima.2010.12.090
To reference this document use:
https://resolver.tudelft.nl/uuid:001a3e7f-ecac-4605-971d-ca9fc12db5c5
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Publication Year
2011
Language
English
Research Group
ImPhys/Charged Particle Optics
Issue number
1
Volume number
645
Pages (from-to)
60-70
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