A time/resistor-referenced capacitive sensor interface for displacement measurement in the sub-nanometer range

Yang, R.; Nihitanov, S.

A time/resistor-referenced capacitive sensor interface for displacement measurement in the sub-nanometer range

Conference paper (2013)

Authors

R. Yang Electronic Instrumentation

S. Nihitanov Electronic Instrumentation

Research Group

Electronic Instrumentation

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Published Date

2013

Language

English

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Research Group

Electronic Instrumentation

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