A time/resistor-referenced capacitive sensor interface for displacement measurement in the sub-nanometer range

Conference Paper (2013)
Author(s)

R. Yang (TU Delft - Electronic Instrumentation)

Stoyan Nihtianova (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/ISIE.2013.6563796
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-5
ISBN (print)
978-1-4673-5194-2

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