Read-out calibration of a SOI capacitive transducer using the pull-in voltage
Journal Article
(2008)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:023225a2-4761-405e-86f4-8bda10f18c16
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Publication Year
2008
Research Group
Electronic Instrumentation
Issue number
6
Volume number
18
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