63 records found
1
Closed-loop operated time-based accelerometer
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Squeeze-film damper design with air channels: experimental verification
Noise analysis of a micro-G pull-in time accelerometer
Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
Design of a time-based micro-g accelerometer
Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope
Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
Qualification of MEMS gyroscope architectures for high performance and tunability
Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
Time based micro-g accelerometer with improved damper geometry
Design and modelling of a decoupled, tunable SOI-MEMS gyroscope
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
Improved damper geometry for parallel-plate MEMS
Read-out calibration of a SOI capacitive transducer using the pull-in voltage
Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage
Full-gap positioning of parallel-plate electrostatic MEMS using on-off control
