63 records found
1
Closed-loop operated time-based accelerometer
Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
Noise analysis of a micro-G pull-in time accelerometer
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Design of a time-based micro-g accelerometer
Squeeze-film damper design with air channels: experimental verification
Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
Design and modelling of a decoupled, tunable SOI-MEMS gyroscope
Time based micro-g accelerometer with improved damper geometry
Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope
Qualification of MEMS gyroscope architectures for high performance and tunability
Improved damper geometry for parallel-plate MEMS
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
Read-out calibration of a SOI capacitive transducer using the pull-in voltage
A feedback operated tunable accelerometer: Analysis and design
Full-gap positioning of parallel-plate electrostatic MEMS using on-off control
