Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope

Design and modelling of a decoupled, tunable SOI-MEMS gyroscope

Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

Qualification of MEMS gyroscope architectures for high performance and tunability

Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture