Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
Conference Paper
(2011)
Author(s)
V Rajaraman (TU Delft - Electrical Engineering, Mathematics and Computer Science)
I Sabageh (External organisation)
PJ French (TU Delft - Electrical Engineering, Mathematics and Computer Science)
G Pandraud (TU Delft - Electrical Engineering, Mathematics and Computer Science)
E Cretu (External organisation)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/J.proeng.2011.12.161
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:8041fd0b-eb80-4dba-8fa6-120c09eb5929
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
647-650
Publisher
Elsevier
Event
Eurosensors XXV (2011-09-04 - 2011-09-07), Athens, Greece
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