41 records found
1
Below-IC post-CMOS integration of thick MEMS on a thin-SOI platform using embedded interconnects
MEMS integration techniques on silicon-on-insulator for inertial devices
A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range
Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
PECVD silicon carbide surface micriomachining technology and selected MEMS applications
Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
Design and modelling of a decoupled, tunable SOI-MEMS gyroscope
Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer
Design and modeling of a flexible contact mode piezoresistive detector for time based acceleration sensing
A piezoresistive detector design for a high sensitivity pull in time digital accelerometer
Pull in time based acceleration sensing
Qualification of MEMS gyroscope architectures for high performance and tunability
Two types of silicon biomimetics MEMS gyroscopes
Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope
A piezoresistive detector design for a high sensitivity time based digital accelerometer
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
A versatile CMOS compatible PECVD silicon carbide MEMS technology
