41 records found
1
MEMS integration techniques on silicon-on-insulator for inertial devices
Below-IC post-CMOS integration of thick MEMS on a thin-SOI platform using embedded interconnects
Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology
Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range
PECVD silicon carbide surface micriomachining technology and selected MEMS applications
Qualification of MEMS gyroscope architectures for high performance and tunability
Two types of silicon biomimetics MEMS gyroscopes
A piezoresistive detector design for a high sensitivity pull in time digital accelerometer
Design and modelling of a decoupled, tunable SOI-MEMS gyroscope
Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
Pull in time based acceleration sensing
A piezoresistive detector design for a high sensitivity time based digital accelerometer
Silicon carbide thin film encapsulation of planar thermo- electric infrared detectors for an IR microspectrometer
Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
Preliminary design and modeling of high performance tunable, decoupled MEMS gyroscope
Design and modeling of a flexible contact mode piezoresistive detector for time based acceleration sensing
A versatile CMOS compatible PECVD silicon carbide MEMS technology
Wafer-level PECVD sic micropackaging technology for MEMS devices
