Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
Artefact
(2011)
Author(s)
V. Rajaraman (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:1c606159-107a-463c-b4a3-14f0524ee4da
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
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