Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture
Conference Paper
(2010)
Author(s)
I Sabageh (External organisation)
V Rajaraman (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:f46f5f42-8146-4fec-a0ef-60ff281b2607
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Publication Year
2010
Research Group
Electronic Instrumentation
Pages (from-to)
96-99
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