Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
Poster
(2010)
Author(s)
I Sabageh (External organisation)
V Rajaraman (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:ceec4ef1-ab06-4062-a589-9eaea9cac3b4
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Publication Year
2010
Language
English
Research Group
Electronic Instrumentation
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