Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Journal Article
(2011)
Author(s)
LA Machado da Rocha (External organisation)
RA Dias (External organisation)
E Cretu (External organisation)
L Mol (TU Delft - Electronic Instrumentation)
Reinoud Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1007/s00542-011-1252-8
To reference this document use:
https://resolver.tudelft.nl/uuid:0cef9f9f-7d9c-4062-8c73-a94b2417f8c7
More Info
expand_more
expand_more
Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Issue number
3
Volume number
17
Pages (from-to)
429-436
No files available
Metadata only record. There are no files for this record.