Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

Journal article (2011)

Authors

LA Machado da Rocha External organisation
RA Dias External organisation
E Cretu External organisation
L Mol Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation