9 records found
1
Gas viscosity sensing based on the electrostatic pull-in timeof microactuators
Gas viscosity MEMS sensor based on pull-in
Closed-loop operated time-based accelerometer
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Design of a time-based micro-g accelerometer
Squeeze-film damper design with air channels: experimental verification
Noise analysis of a micro-G pull-in time accelerometer
A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range
Time based micro-g accelerometer with improved damper geometry
