Gas viscosity MEMS sensor based on pull-in
Conference Paper
(2013)
Author(s)
RA Dias (External organisation)
G. de Graaf (TU Delft - Electronic Instrumentation)
R. F. Wolffenbuttel (TU Delft - Electronic Instrumentation)
LA Machado da Rocha (External organisation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/Transducers.2013.6626933
To reference this document use:
https://resolver.tudelft.nl/uuid:8059c061-a873-4aaa-879f-24d66ad6dca4
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Publication Year
2013
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
980-983
ISBN (print)
978-1-4673-5983-2
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