Gas viscosity MEMS sensor based on pull-in

Conference Paper (2013)
Author(s)

RA Dias (External organisation)

G. de Graaf (TU Delft - Electronic Instrumentation)

R. F. Wolffenbuttel (TU Delft - Electronic Instrumentation)

LA Machado da Rocha (External organisation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/Transducers.2013.6626933
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
980-983
ISBN (print)
978-1-4673-5983-2

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